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Design and Optimization of a MEMS Based Piezoresistive Pressure Sensor for Hash Flood Level Measurement.

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dc.contributor.author Priyadarshana, TGP
dc.contributor.author Wijethunge, HMDP
dc.contributor.author Jayasekara, BCCP
dc.contributor.author Amarasinghe, YWR
dc.contributor.editor Rodrigo, R
dc.date.accessioned 2022-12-22T07:40:04Z
dc.date.available 2022-12-22T07:40:04Z
dc.date.issued 2013-02
dc.identifier.citation ***** en_US
dc.identifier.uri http://dl.lib.uom.lk/handle/123/19868
dc.description.abstract This paper is focused on designing and optimization of a Micro Electro Mechanical System (MEMS) based piezoresistive .t ype pressure 10 enhance the sensitivity by optimally utilizing the maximum available Silicon wafer cell volume of 3mmX3mmX400pm and a fixed thickness of 10pm due to fabrication constrains. Here an analysis is carried out by varying the dimensions of two different diaphragm geometries, namely conventional square type diaphragm and cross-sectional beam type diaphragm. The analysis is done using finite element method (FEM) technique in ANSYS software and by comparing the results, the better diaphr agm type is chosen for the required pressure range oj the application for flash fiood level The results show that for some pressure ranges the cross-sectional beam type diaphragm delivers a much better sensitivity than the conventional square type diaphragm. en_US
dc.language.iso en en_US
dc.publisher The Engineering Research Unit, University of Moratuwa en_US
dc.title Design and Optimization of a MEMS Based Piezoresistive Pressure Sensor for Hash Flood Level Measurement. en_US
dc.type Conference-Full-text en_US
dc.identifier.faculty Engineering en_US
dc.identifier.department Engineering Research Unit, University of Moratuwa en_US
dc.identifier.year 2013 en_US
dc.identifier.conference National Engineering Conference Engineering Research For Nation Building en_US
dc.identifier.place Katubedda en_US
dc.identifier.pgnos pp. 55-61 en_US
dc.identifier.proceeding Proceedings of the 18th Annual Research Symposium en_US


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