Mitigation of the effects of micro-tremors on high sensitive facilities

Abstract

High technology industries that produce micro-electronic components and other facilities need extreme precision experimental measurements at sub-micron level. The current and future products continue to decrease in sizes and the technology used to make these products demands stringent vibration control environment. Design process of the facilities is the most promising method to achieve this stringent vibration control environment. Automatic updating of finite element model was developed for simulating the effects of micro-tremors on a typical building: The model was employed for exploring the vertical response of floors under base excitation. The vertical responses of the floors in the building due to for an example ground vibration signal were obtained and converted to vibration criterion curve to compare with specific vibration acceptance criteria. The structural parameters were iterated until the required level of vibration control was achieved and the structural elements can be optimized.